| 摘要 |
PURPOSE:To obtain a laser output with high efficiency by connecting a second peaking capacitor in parallel with an arc gap circuit and a discharge circuit between the series circuit of an arc gap for pre-ionization and a first peaking capacitor and a main stroke spacing for laser excitation. CONSTITUTION:A switching element 8 is turned ON, and energy stored in a main capacitor 6 is transferred to a first peaking capacitor 4. A main stroke spacing 1 is pre-ionized by ultraviolet rays generated by arc discharge in an arc gap 3 generated at that time. Stored energy is moved to a second peaking capacitor 5 from the peaking capacitor 4, and voltage Vd rises between main discharge electrodes. Since the main stroke spacing 1 is pre-ionized previously, discharge currents Id for laser excitation are acquired in the main stroke spacing 1. The discharge currents Id flow through a main stroke circuit C, D, F, E. Since the main stroke circuit C, D, F, E can reduce inductance, the rise of discharge currents Id is accelerated, thus obtaining a laser output having high efficiency. |
