| 摘要 |
PURPOSE:To set a stabilized reference pressure, by providing an air hole previously at a vessel forming a reference pressure chamber of a pressure transducer and sealing the air hole with solder after heating and degassing in a certain reference pressure atmosphere. CONSTITUTION:A silicone diaphragm 1 is stuck to a metallic stem 3 which is in one body with a pipe 12 for conducting pressure through a silicone pedestal 2 having a through-hole 14. There, the diaphragm 1 and the pedestal 2, and the pedestal 2 and the stem 3 are hermetically stuck with solder, respectively. Changes of resistance in a strain gauge 1A formed at a prescribed position of the diaphragm 1 in accordance with pressure to be measured, are hermetically sealed with bonding wires 4 and hermetic seals 6 and are transmitted to an outer circuit as an electrical signal through lead pins 5. A recessed part 13 is formed concentrically to an air hole 8 at a metallic cap 7, and solder 9 is soldered previously to the cap 7. By this way, after degassing treatment in a vacuum tank, the solder 9 is heat-melted and a hole 11 of the solder 9 is sealed to form a reference pressure chamber 10. |
