发明名称 |
Process for the preparation of silicon nitride powder |
摘要 |
A high-purity alpha -silicon nitride powder exclusively comprising crystals in granular form is prepared by thermal decomposition of a nitrogen-containing silane compound containing at least 0.1 g/cm<3> of silicon. <IMAGE>
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申请公布号 |
DE3235304(A1) |
申请公布日期 |
1983.04.14 |
申请号 |
DE19823235304 |
申请日期 |
1982.09.24 |
申请人 |
TOYO SODA MANUFACTURING CO.,LTD. |
发明人 |
NAGATA,SINJI;KASAI,TIYOSHI;TSUKIDATE,TAKAAKI |
分类号 |
C01B21/068;C01B21/082;C01B21/087;(IPC1-7):C01B21/06 |
主分类号 |
C01B21/068 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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