发明名称 Process for the preparation of silicon nitride powder
摘要 A high-purity alpha -silicon nitride powder exclusively comprising crystals in granular form is prepared by thermal decomposition of a nitrogen-containing silane compound containing at least 0.1 g/cm<3> of silicon. <IMAGE>
申请公布号 DE3235304(A1) 申请公布日期 1983.04.14
申请号 DE19823235304 申请日期 1982.09.24
申请人 TOYO SODA MANUFACTURING CO.,LTD. 发明人 NAGATA,SINJI;KASAI,TIYOSHI;TSUKIDATE,TAKAAKI
分类号 C01B21/068;C01B21/082;C01B21/087;(IPC1-7):C01B21/06 主分类号 C01B21/068
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