发明名称 |
Controlled porosity sheet for thermionic dispenser cathode and method of manufacture |
摘要 |
A controlled porosity sheet defining a surface for a thermionic dispenser cathode and a method of manufacture. Starting with a generally flat silicon template substrate structure having an array of upstanding microposts 1-25 microns across on 5-100 micron spacings from each other, a layer of metal is deposited on the substrate to surround the microposts and cover the substrate structure to a desired depth. The metal layer is then abraded to a smooth, flat surface which exposes the microposts. Thereafter, the silicon substrate and microposts are completely etched away, leaving a metal sheet having micron-size holes therethrough.
|
申请公布号 |
US4379979(A) |
申请公布日期 |
1983.04.12 |
申请号 |
US19810232444 |
申请日期 |
1981.02.06 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
THOMAS, RICHARD E.;GREENE, RICHARD F. |
分类号 |
H01J1/28;(IPC1-7):H01J1/14;H01J19/06;H01K1/04 |
主分类号 |
H01J1/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|