| 摘要 |
<p>A capacitive pressure transducer (70) having a first flexible electrically insulative diaphragm (72) disposed apart from a second electrically insulative member (74), including a second flexible diaphragm, and where the diaphragm and member include metalized portions (72, 74, 76) thereon forming the plates of a pressure sensing capacitor. The transducer further includes a pair of electrically insulative sealing rings (100, 102) disposed concentrically about one another which function to space said diaphragm and member apart and which form a hermetically sealed cavity therebetween, to establish the pressure sensitive region of the diaphragm and to reduce the tensile forces in the inner most sealing ring.</p> |
