发明名称 ASCERTAINING METHOD FOR WATER PENETRATION ROUTE INTO RESIN SEALED ELEMENT
摘要 PURPOSE:To find out the condition and route of infiltrating water by a method wherein, after an infiltrating solution containing dissolved fluorescent paint has been infiltrated, an optional surface is exposed by grinding the surface of a resin package, and the infiltrated fluorescent paint is ascertained by irradiating ultraviolet-rays. CONSTITUTION:An infiltrating solution 7 containing dissolved fluorescent paint is filled in a fluorescent infiltration vessel 5, and the product S of resin sealed semiconductor device, whereon exfoliation is generated by a dampproof property test such as a pressure-cooker test and the like, a dipped in the vessel 5. Then, the solution 7 is infiltrated into the exfoliated parts 1a-2b-2a and 1a-3b-3a by applying atmospheric pressure or the pressure in excess thereof, and the extent of infiltration of the solution in the exfoliated parts 2a and 3a located on the upper surface of the resin 4 or the pellet 2 is tested. The upper surface side of the pellet 2 is slowly ground stepwise, and the condition and route of infiltration of water is found out by the fluorescence generated by irradiating ultraviolet rays sent from an ultraviolet ray irradiating device at each test performed.
申请公布号 JPS5861636(A) 申请公布日期 1983.04.12
申请号 JP19810160206 申请日期 1981.10.09
申请人 HITACHI SEISAKUSHO KK 发明人 OKIKAWA SUSUMU;MIKINO HIROSHI;SUZUKI HIROMICHI
分类号 H01L21/66;G01M3/20;H01L21/56 主分类号 H01L21/66
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