| 摘要 |
PURPOSE:To form plural vapor deposited layers on the surface of a substrate foil with good adhesive strength in a short time by disposing plural evaporating sources below the take-up surface of the foil, and moving the desired evaporating source to an evaporating position at every changing of the taking-up direction. CONSTITUTION:A substrate foil 4 of coiled Al foil or the like is mounted on the 1st reel 2 in a vacuum vessel 1, and the 1st evaporating source 7 contg. a vapor depositing material such as Cr and the 2nd evaporating source 8 contained with a vapor depositing material such as Cr2O3 are placed on a moving device 6. The inside of the vessel 1 is evacuated to a vacuum, and the source 7 is moved up to an evaporating position by the device 6. While the foil 5 to be vapor deposited is taken up with the 2nd reel 3, the material 9 is vapor deposited. Thereafter the source 8 is moved to the evaporating position and while the foil 5 is taken up in the opposite direction with the 1st reel 2, the material 10 is vapor deposited. By this method the selective absorptive films for solar heat consisting of the plural vapor deposited layers having excellent adhesive strength are formed in a short time. |
