| 摘要 |
PURPOSE:To form plural vapor deposited layers on the surface of a substrate foil with good adhesive strength in a short time by disposing plural evaporating sources via a partition plate below the take-up surface of the foil, and vapor depositing plural materials without overlapping the vapor deposition range. CONSTITUTION:A substrate foil 2 of coiled Al foil or the like applied with pretreatments is mounted on a rewinding reel 3 in a vacuum vessel 1. The 1st, 2nd evaporating sources 6, 7 are disposed at an equal interval via a partition plate 10 below the take-up surface of said foil. A vapor depositing material 8 such as Cr is contained in the source 6 and a vapor depositing material 9 such as Cr2O3 in the source 7. While the foil 4 is taken up with a take-up reel 5, the materials 8, 9 are vapor deposited on said foil under prescribed conditions, whereby films 13 provided with a vapor deposited layer of the material 8 and a vapor deposited layer 12 of the material 9 are formed. By this method the selective absorptive films for solar heat having freedom from oxidation and contamination on the surfaces of the respective layers 11, 12 and having excellent adhesive strength are formed. |
