| 摘要 |
PURPOSE:To form plural vapor deposited layers of selective absorptive films for solar heat, etc. on the surface of a substrate foil in a short time by disposing plural evaporating sources at prescribed intervals, and vapor depositing plural vapor depositing materials on said foil which is taken up in a vacuum atmosphere superposedly. CONSTITUTION:A substrate foil 2 such as a coiled Al foil or the like applied with pretreatments is mounted on a rewinding coil 3 in a vacuum vessel 1. The 1st and 2nd evaporating sources 6, 7 are disposed at prescribed intervals below the take-up surface of the foil 2, and evaporating materials 8, 9 such as Cr or the like for the 1st evaporating source and Cr2O3 or the like for the 2nd evaporating source 7 are contained in the 1st and 2nd evaporating sources. While the foil 2 is taken up with a take-up reel 5, films 13 formed with a vapor deposited layer 10 of the 1st material 8, mixed vapor deposited layers 11 of the 1st, 2nd materials 8, 9 and a vapor deposited layer 12 of the material 9 successively from the foil 4 side are formed thereon. By this method the selective absorptive films for solar heat having less interference effect of light and excellent heat absorptivity and adhesive strength are formed. |
