发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To perform a test in a short time at a low cost by a method wherein a test circuit is provided on a dicing line, an IC test is started by an external signal, and a defective and non-defective judgement signal is generated as soon as the test is finished. CONSTITUTION:Chips 141, 142 and so on, whereon an IC and test circuits 131, 132 and so on were formed between dicing lines 12 respectively, are provided. The test of IC is started by giving a signal to the test circuit from outside, a defective or non-defective judgement signal is outputted when the test is finished, and subsequently, the defective or non-defective judgement is given to the other circuits 132 and so on in the same manner one after another. According to this constitution, a signal can be given to the test circuit 13 without having a probe to come in contact with an electrode each time a test is performed, and this enables to cut down the testing time. Also, no special device is necessary in this constitution and the test can be performed at low cost.
申请公布号 JPS5861639(A) 申请公布日期 1983.04.12
申请号 JP19810160527 申请日期 1981.10.08
申请人 TOKYO SHIBAURA DENKI KK 发明人 ISHIUCHI HIDEMI
分类号 H01L21/822;H01L21/66;H01L27/04 主分类号 H01L21/822
代理机构 代理人
主权项
地址