发明名称 IDENTIFYING METHOD FOR SEMICONDUCTOR CHIP
摘要 <p>PURPOSE:To improve the efficiency precentage of semiconductor chips, by a method wherein each of chips formed in the same wafer in one lot is provided with an individual mark, thereby allowing each chip to be identified. CONSTITUTION:Each of a plurality of chips 2 fomred in the same wafer 1 is provided with an individual identification mark 4, e.g., an individual number. After the identification mark 4 is read and stored by means of a TV camera or the like, electrical characteristics of each chip 2 is measured to judge the quality thereof and the rank to which the chip belongs if it is good, and the result is also stored. Upon completion of measurement for all the chips, the wafer 1, together with the mark and judging result of each chip 2, is sent to the subsequent assembling step, where the chips cut are sorted according to their characteristics and then assembled.</p>
申请公布号 JPS5860529(A) 申请公布日期 1983.04.11
申请号 JP19810160626 申请日期 1981.10.06
申请人 MITSUBISHI DENKI KK 发明人 YOSHIDA MIYOSHI;KOTANI KIYOUHIKO
分类号 H01L21/02;H01L23/544;(IPC1-7):01L21/02 主分类号 H01L21/02
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