发明名称 SURFACE GRINDING ATTACHMENT WITH WORKING PRESSURE COMPENSATOR
摘要 PURPOSE:To compensate the extent of working pressure according to wear of an upper surface plate, by measuring weight of the upper surface plate by the sensor attached to a piston rod of a cylinder, and regulating fluid pressure to be fed to the cylinder as much as a portion for the wear. CONSTITUTION:When weight of an upper surface plate 11 is measured on the basis of working force acting on a sensor 21, the measured value is inputted into a control circuit, and hereat it is compared with the reference value inputted in advance. And, a control signal corresponding to the difference is outputted to a pressure control valve 25, whereby fluid pressure to be fed to a head chamber 17a of a sub-cylinder 17 is increased. Therefore, the fluid pressure is increased as much as a portion for decrement of the weight W of the upper surface plate 11, thus working pressure is kept constant and compensated.
申请公布号 JPS6322266(A) 申请公布日期 1988.01.29
申请号 JP19860163464 申请日期 1986.07.11
申请人 SPEEDFAM CO LTD 发明人 NAGAHASHI ISAO;MAEDA SEIICHI;HAKOMORI SHIYUNJI
分类号 B24B37/005 主分类号 B24B37/005
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