发明名称 Electroplating bath for producing uniform Fe-containing layers and structures having very good magnetic properties
摘要 In the specified electroplating bath a facility for automatically monitoring and controlling the bath is provided at the same time by as small a number of bath components as possible. This increases the operating reliability of the bath. According to the invention, an electroplating bath has a high concentration of Ni and Fe ions to be discharged, combined with citrate and/or citric acid as main additive, and a pH of about 4.0. Only two types of additives, in particular, are required. An electroplating bath for producing uniform Fe-containing layers and structures having very good magnetic properties is operated, according to the invention, in such a way that the bath solution is irradiated with UV light, thereby reducing Fe(III) ions. This makes it possible to control an electroplating bath for producing uniform Fe-containing layers and structures using an automatic control circuit. <IMAGE>
申请公布号 DE3137478(A1) 申请公布日期 1983.04.07
申请号 DE19813137478 申请日期 1981.09.21
申请人 SIEMENS AG 发明人 WAGNER,UDO,DIPL.-CHEM.DR.
分类号 C25D3/56;C25D5/00;C25D21/12;(IPC1-7):C25D3/56;C25D7/00;G11B5/12 主分类号 C25D3/56
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