发明名称 DETECTION METHOD FOR POSITION OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To enhance the contrast in the periphery of an element and improve the probability of detection, by providing a layer having a plane of irregular reflection on the surface of an element fixing header or a fixing pad, when detecting the reflected light generated by irradiating light onto a semiconductor element by a photoelectric conversion means resulting in the detection of the element position. CONSTITUTION:A fixing pad 11 whereon a conduction path 12 is provided on the end part is adhered on a ceramic or insulating metallic substrate 10, and the element 13 is fixed at the fixed position via Hg conductive paste 14 having the area sufficiently larger than that of the semiconductor element 13. Thereat, a large plane of irregular reflection is formed on the surface of the paste 14 which is made to overflow from the periphery of the element 13, in this state, parallel light is irradiated over the entire surface, and the light reflected from the surface of the element 13 is detected by the photoelectric conversion means resulting in the detection of the position of the element 13. Thus, the overflown part of the paste 14 turns dark, and the outer shape of the element 13 becomes clear resulting in the remarkable enhancement of the possibility of detection of the element 13.
申请公布号 JPS5857732(A) 申请公布日期 1983.04.06
申请号 JP19810156845 申请日期 1981.10.01
申请人 SANYO DENKI KK;TOKYO SANYO DENKI KK 发明人 SEKINE TOSHIO;UCHIDA YUKISHIGE;KANAKUBO MASARU
分类号 G01B11/00;H01L21/60;H01L21/68 主分类号 G01B11/00
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