| 摘要 |
PURPOSE:To form low-crosslinkage polymer membranes having a uniform thickness and quality on a plurality of bases, by introducing a carrier gas to one end of each of a plurality of discharge tubes provided within a vacuum vessel, discharging the carrier gas to activate organic gas molecules and leading the activated molecules to each base. CONSTITUTION:A carrier gas is introduced through a carrier gas inlet pipe 3 provided on one end of a discharge tube 1, and a high-frequency voltage is impressed across a high-frequency coil 2 to generate glow discharge. Organic active species are formed by introducing an organic gas into the downstream of the plasma stream generated. A thin polymer membrane is formed on a surface 6 by leading the mixed gas stream of the organic species and the carrier gas flowing from another and 10 of the discharge tube 1. A membrane thickness sensor 9 is incorporated in the final stage. Thus, it is possible to obtain a constant membrane thickness by suspending the discharge only in this stage when a predetermined membrane thickness is attained. |
