发明名称 Method for maskless chemical machining
摘要 A method for high resolution maskless chemical and electrochemical machining is described. Preferential etching results from exposing those regions where machining is sought to an energy beam. Such exposures can increase the etching rate in the case of electrochemical machining by a factor of 103 to 104. Such enhancement is sufficient to make masking unnecessary.
申请公布号 US4379022(A) 申请公布日期 1983.04.05
申请号 US19800170472 申请日期 1980.07.21
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 MELCHER, ROBERT L.;ROMANKIW, LUBOMYR T.;VON GUTFELD, ROBERT J.
分类号 C23F1/02;C25F3/14;H01L21/3213;(IPC1-7):C23F1/02 主分类号 C23F1/02
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