| 摘要 |
PURPOSE:To obtain a mask high in gas purging effect, and not causing chipping, etc., especially in providing a groove on a mask plate for use in micropattern formation, by providing a V-shaped gas-purging groove in a specified depth on the light-shading film forming face of a light transmitting glass plate. CONSTITUTION:A gas purging groove 1e having an obtuse V-shape is formed on the face of a light-transmitting glass plate 1a to be coated with a light-shading film 1b at the position corresponding to a scribe area a in 1-100mum depth d by using a rotary shaft blade, thus permitting chipping to be prevented on the vicinity C of the groove 1e, therefore, a pattern 1b to be prevented from damage due to chipping in forming a photomask 1, and an exposed film not to be deteriorated in quality by diffused reflection of UV rays, gas to be well purged, and a photomask superior in adhesion to be obtained. |
