发明名称 INSTALLATION POUR LE DEPOT DE COUCHES SOUS VIDE A TRAVERS DES MASQUES, MUNIE D'UN DISPOSITIF PERMETTANT DE CHANGER DE MASQUE
摘要 <p>Flat electro-luminescent screens etc., are produced by vacuum deposition, through masks, of a number of different layers. The sample to be coated is located in a carrier, which can be rotated in a vacuum chamber. On the carrier is mounted a disc, around which the masks are cut. When the carrier is stopped, in the right position in the chamber, a rod may be engaged with the axis carrying the disc. The disc can then be rotated to position the required mask over the sample. The rod is retracted and the mask is held against the sample by a spring. It is located by an indexing peg on the carrier engaging in a hole in the disc. Changing masks without releasing the vacuum and opening the chamber considerably reduces changers of pollution at the interfaces of the layers. It also saves time.</p>
申请公布号 FR2513661(A1) 申请公布日期 1983.04.01
申请号 FR19810018415 申请日期 1981.09.30
申请人 TUETA ROGER 发明人 ROGER TUETA, JOSEPH WATTRE ET MICHEL BRAGUIER;WATTRE JOSEPH;BRAGUIER MICHEL
分类号 C23C14/04;C23C14/50;(IPC1-7):23C13/08 主分类号 C23C14/04
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