| 摘要 |
PURPOSE:To enable continuous measurement of the functions, electric characteristics and frequency of a semiconductor integrated circuit automatically by connecting a frequency measuring apparatus to the conventional tester. CONSTITUTION:An integrated circuit measuring apparatus is composed of a DC parametric test unit 1, a microprocessor 2 and a selector 4. The DC parametric test unit 1 is connected to any terminal of an object 6 to be measured by a selection circuit network of the selector 4. Moreover, the selector 4 is controlled automatically with a microprocessor 2 thereby enabling the fast switching of terminals. Therefore, a switching circuit 5 is inserted between the parametric test unit 1 and the selector 4 and controlled with the microprocessor 2 whereby characteristics of the frequency can be measured for a terminal of the object 6 being measured as selected by the selector 4 with a frequency measuring unit 3. |
