| 摘要 |
<p>PURPOSE:To decrease the time required for replacement of a substrate by a method wherein a vacuum chamber and the outside of the chamber are connected and at least two paths of rail with which a conveying jig, used to convey and install the material to be processed, will be guided and a switching mechanism with which the conveying jig will be transfered between the two paths are provided. CONSTITUTION:A substrate transfering part 14, the first preparation chamber 15, the second preparation chamber 16 and a processing chamber 17 are provided in the title substrate conveying device. The preparation chambers 15 and 16 and the processing chamber 17 are cubic vacuum chambers having individual exhaust systems, and gate valves 18, 19 and 20 are also provided respectively. A rail 21 for a carrying-in path with which the conveying jig 25 of a substrate 26 will be guided, and the rail 22 to be used for carryingout path are provided in each of the above-mentioned chambers. A switching mechanism 23 is provided in the substrate transfering part 14, the jig 25 on the rail 22 is shifted to the rail 21, a switching mechanism 24 is provided in the preparatory chamber 16, and the jig 25 on the rail 21 is moved to the rail 22. The replacement time of the substrate can be cut down by constituting the title conveying device as above-mentioned.</p> |
