| 摘要 |
PURPOSE:To obtain an ion pump that exhausts rare gas stably by providing in an anode tube a gap section with an area exceeding a half of the external surface area of said tube, allowing the material sputtered from a cathode to pass through the said anode tube, and arranging a collection electrode along the periphery of the said anode tube while it is being separated from it. CONSTITUTION:Eight blade bodies 16 adhere between two anodes an and end member 1a and the said anode end member 1a or a blade 1b is integrated to form a tube with a gap that connects the internal and external sections of the said tube that exceeds a half of the external surface area of the tube wall. The said tube is used as the anode 1. The molecules appearing at the internal section of the said vacuum container 10 from flange 9 is incident on the location of discharge and is ionized. The ion is accelerated and is incident on the said cathode 3. It also sputters the surface material. The greater part of the sputtered material passes through the gap of the tube of the said anode 1, reaches the said collection electrode 4, and effectively acts on the exhaust operation. |
