发明名称 Method and apparatus for producing laminated capacitors
摘要 Method for producing laminated capacitors, including a rotatable drum having a periphery and recesses formed therein, carriers disposed on the drum in the recesses defining a setting range on the periphery of the drum, a first vacuum chamber for metal layer deposition, a second vacuum chamber for insulating material layer deposition, means for supplying a vapor jet through a path in the first vacuum chamber and a shielding mask for shielding the carriers from the vapor jet, which includes shielding off the carriers from the vapor jet with the shielding mask before vapor deposition, alternatingly conducting the carriers on the drum through the first and second vacuum chambers, removing the shielding mask from the vapor jet path after a given number of revolutions of the drum for the period during which the setting range on the periphery of drum rotates through the first zone, and reintroducing the shielding mask in the vapor jet path after the last metal layer has been deposited during the rotation through the setting range, and a device for carrying out the method.
申请公布号 US4378382(A) 申请公布日期 1983.03.29
申请号 US19810283821 申请日期 1981.07.16
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BEHN, REINHARD
分类号 B65G47/84;C23C14/24;C23C14/56;H01G4/015;H01G4/18;H01G4/30;H01G13/00;(IPC1-7):B05C11/00 主分类号 B65G47/84
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