| 摘要 |
PURPOSE:To obtain an ion generator with simple structure and small power consumption that can be used only by exhausting air by means of an exhaust device of a small capacity, by adding a control electrode to a crossed field discharge device, in order to control discharge, and increasing the sputtering quantity of the substance of a cathode bar section. CONSTITUTION:In the figure 20, is a support body made of an insulator. It supports an anode 11, the first cathode 13 and a control electrode 17 through an illustrated support that is additionally used as a conduction path and forms an electric connection section. A lead wire from a power supply output is connected to each electrode at said electric connection section. The support body is supported by a post 10 and the said post 10 is supported on a structure. An ion source that increases the output heavy ion beam strength can be provided by controlling the ion energy distribution that impacts on the first cathode provided with a bar section as a part that is a member from which an ion is to be generated in the crossed field discharge device to which the cathode electrode is added, and using it in an area where the large sputtering ratio is obtained. |
