| 摘要 |
PURPOSE:To stabilize the oscillation frequency of a laser by using an acoustooptic frequency modulator for modulating the frequency of laser beams while detecting error signals as employing the modulation signals as reference signals and controlling the oscillation frequency of a laser oscillator on the basis of the error signals detected. CONSTITUTION:One part of the laser beams 10 projected from a laser oscillator 1 is reflected by means of a beam splitter 2, and projected to the acoustooptic frequency mudulator 3. The acoustooptic frequency modulator 3 gives incident light 11 frequency deviation equal to the frequency of the output signals of a voltage-controlled oscillator 7 controlled by the reference signals generated by a reference signal generator 6, and projected light is obtained. The projected light of the acoustooptic frequency modulator 3 is inputted to a device 4 having an absorption or transmission spectrum as the frequency reference, and transmitted light acquired is converted into electric signals by means of an optoelectric transducer 5. Accordingly, electric signals, obtained are phase-detected by means of a phase detector 8 while the reference signals of frequency for generated by the reference signal generator 6 are referred. |
