MAGNETRON SPUTTERING APPARATUS,申请号JP19860170066-传众专利搜索

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发明名称	MAGNETRON SPUTTERING APPARATUS
摘要
申请公布号	JPS6326360(A)	申请公布日期	1988.02.03
申请号	JP19860170066	申请日期	1986.07.18
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MURAKAMI MOTOYOSHI;UCHIDA KIYOSHI;KAWABATA HIDEJI
分类号	C23C14/36;C23C14/35	主分类号	C23C14/36
代理机构		代理人
主权项
地址

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