ANALYTIC ELECTRON MICROSCOPE

摘要

PURPOSE:To perform the correction of the energy shifting automatically by modulating the strength of the energy analyzer such that the output electron energy will be constant irrespective of the variation of the irradiating position of the electron beam on the specimen. CONSTITUTION:The electron beam EB is irradiated on the specimen 2 in the focus lens system 1 to feed a portion of the passed e1ectron to the energy analyzer 3 and the electron having the specific energy is detected by the detector 5 to be fed to the display 8. While the output of the scan power source 7 for producing the saw-tooth signal is fed through the control circuit 11 to the excitation power source 10 for the analyzer 3 thus to modulate the strength of the analyzer 3 such that the output electron energy will be constant in relation to the scanning of the electron beam EB. Consequently even when the position of the electron beam EB on the specimen 2 is moved, it will never cause the shifting of the electron energy passing through the output slit 4 and the correction can be performed automatically.