| 摘要 |
PURPOSE:To perform the positioning of a substrate accurately on the bottom surface of a receiving vessel by a method wherein the receving vessel on the substrate holder is tapered and made into the shape of opening the mouth at a place above the comparatively larger diametered place, followed by falling the substrate from an upper position, then led to a proper location. CONSTITUTION:A vacuum chuck 4 is initially located in the rear upper position as indicated by solid lines. Next, the chuck 4 attracts a substrate 3 positioned on a conveyer 12 and changes its position to occupy a forward position with face down, over a receiving seat 2 in a substrate holder 1, as indicated by chain lines. Next, the chuck 4 is released, causing the substrate 3 to drop into the receiving seat 2 under its own weight. The unit being constructed as such, the substrate 3, even when it is incorrectly positioned in the receiving seat 2, can finally be settled rightly on the bottom of the receiving seat 2 due to the tapered walls 2a of the receiving seat 2. |
