| 摘要 |
PURPOSE:To effectively prevent the entrance of a polishing solution (compound solution) or the like into a supporting shaft, etc. at a rotary bottom part, by tiltably supporting a rotary container and by discharging the polishing solution through the opening of the rotary container. CONSTITUTION:A vertical barrel tank 62 consisting of a cylindrical peripheral wall part 52 and a rotary bottom part 38, is charged thereinto with a polishing solution 40 together with works 56 and media 56, and is rotated in this condition by means of a rotary container 34 which is fixed with the bottom part 38 of the tank 62 and which is in turn rotated by a motor 44. Since a rotary shaft 30 is integrally fixed to the rotary container 34 without extending therethrough, the entrance of the solution 60 into bearings 22, 28 may be effectively prevented. Further, the solution 60 and foreign matters mingled thereinto may be easily discharged through the opening of the container 34 by tilting the container 34 so that the obstacle of discharging due to the blocking of a discharging passage or a discharge valve may be eliminated. |
