| 摘要 |
PURPOSE:To make a high-precision positioning possible, by providing a zone plate on one face of a substrate and irradiating a laser light to generate the spot of an airy disk on a positioning face and performing the positioning on a basis of this spot. CONSTITUTION:A mark for positioning of 10mu diameter is provided on an original mask face 24, and the print to a substrate 28 is performed through a focusing system 25. A film 26 for print is provided on the upper face of the substrate 28, and an array-shaped pattern 30 and zone plates 31A and 31B for positioning are provided on the lower face. The laser light is irradiated to them to generate the spot of an airy disk on a photoresist 27, and a spot is generated on the original mask face 24 conjugate to this photoresist 27. The positioning is so performed that this spot is put in the mark for positioning of 10mu diameter, and thus, the positional deviation between the pattern of the film 26 and the pattern 30 is restrained to a dimension error close to the spot diameter, and a high-precision positioning is possible. |
