| 摘要 |
PURPOSE:To control the operation of a table with high precision, by providing a finely displacing element, where a piezoelectric effect is utilized, in the connection part between a table driving mechanism and the table. CONSTITUTION:A finely displacing element 21 utilizing a piezoelectric effect is provided in the connection part between a table 18 and a table driving mechanism consisting of a motor 11, reduction gears 12 and 13, a bearing 14, a feed screw 15, a guide 19, etc. The change and the feed variance of the table 18 in the axial direction are detected by a detecting part 20, and the difference value resulting from comparison with a target value is given as an electric input to the element 21, thus correcting and controlling the movement of the table 18. |
