发明名称 COATING PROCESS
摘要 A method of masking a workpiece (21) to prevent the adhesion of a deposited tightly adhering conformal coating (28) formed from the condensation of a vaporous diradical such as paraxylylene on selected portions of the workpiece. The process requires the covering of those areas of the workpiece to which adhesion is not desired with a non-polymerizing hydrocarbon (26) and placing the covered area in close contact with an open cellular material (27) containing a predominance of interconnecting cells which provide a large surface area for condensation of the unwanted condensate of the diradical, exposing the workpiece (21) to the vaporous diradical, removing the workpiece (21) from the open cellular material (27) and immersing the workpiece in a solvent for swelling and dissolving the hydrocarbon (26) covering.
申请公布号 DE3062031(D1) 申请公布日期 1983.03.24
申请号 DE19803062031 申请日期 1980.07.18
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CLARK, ROGER JAMES;KENNISON, ROBERT ELLIS
分类号 B05D1/32;B05D7/24;H01L23/50;H05K3/28;H05K13/00;(IPC1-7):05D1/32;05K13/00;05K3/28 主分类号 B05D1/32
代理机构 代理人
主权项
地址