| 摘要 |
PURPOSE:To improve stability in a holder and obviate the occurrence of a fine oscillating phenomenon, by coupling two pairs of twin parallel springs in series in a perpendicular direction. CONSTITUTION:Making up the first parallel spring with plate springs 23a and 23b and the second parallel spring with plate springs 23c and 23d respectively, the first and the second parallel springs are connected to each other with a junction member 24 whereby a two-stage parallel spring structure is formed. A movable body 22 and fining member 21 are coupled together via said two-stage parallel spring whereby the movable body 22 comes possible to achieve a parallel forward motion. This is to say, the movable body 22 performs the parallel forward motion is a Z-axis direction by the first parallel spring and, in turn, the parallel forward motion in a Y-axis direction by the second parallel spring respectively. |
