摘要 |
PURPOSE:To prevent a valve from vibrating without impairing the control characteristics by providing a diaphragm moving in conjunction with a valve element controlling the fluid flow so as to form a damper chamber. CONSTITUTION:A diaphragm 25 moving in conjunction with a valve element 18 is provided to form a damper chamber A, and also a primary pressure chamber B is formed with a body 4 and the valve element 18, etc. beneath the diaphragm 25. The damper chamber A is connected to the primary pressure chamber B with a fine hole 26 provided on the diaphragm 25. When the current flowing through a coil 12 is increased or decreased, a plunger 16 is moved up or down and the diaphragm 25 is also moved accordingly, thus the volume of the damper chamber A is changed. If the plunger 16 is moved up or down at a normal speed, the gas in the damper chamber A is connected to the primary pressure chamber B through the fine hole 26, and the movement of the plunger 16 is not hindered. However, the gas acts to hinder the movement of the plunger against such a quick movement as a valve vibration, thereby a valve vibration can be prevented. |