发明名称 PRESSURE-ELECTRICITY TRANSDUCER
摘要 PURPOSE:To secure air-tight sealing and improve reliability by a transducer wherein an enclosure is made of glass entirely and the number of sealed attachment parts is reduced. CONSTITUTION:An enclosure 14 is made of glass entirely inclusive of sealed attachment part 14a of external lead terminals 4 for input and output of electric signals, a pipe part 14c having a vent hole 14b for introducing pressure to be measured, and an air-tightly sealed part 14d. This transducer is assembled as follows. Using the enclosure 14 with the external lead terminals 4 for input and output of electric signals being attached in a sealed manner and with the air- tightly sealed part 14d being still open, a mount 2 and a pressure sensitive element chip are attached using adhesives 8, 7 respectively, and then internal lead wires 9 are connected. Thereafter, the open air-tightly sealed part is closed to make the pressure within the enclosure 12 become constant standard level, and then glass is welded at the air-tightly sealed part 14d thereby to effect air- tight sealing.
申请公布号 JPS5850443(A) 申请公布日期 1983.03.24
申请号 JP19810150251 申请日期 1981.09.21
申请人 MITSUBISHI DENKI KK 发明人 YAMAGAMI KOUZOU
分类号 G01L9/04;G01L9/00;H01L29/84 主分类号 G01L9/04
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