| 摘要 |
PURPOSE:To realize cost reduction and obtain compact system by configurating the cover opening/closing system so that the cover can be opened and closed with only one drive cylinder. CONSTITUTION:When the bracket 3 is boosted by the drive cylinder 16 for ascending/descending movement or rotating movement, the guide roller 18 rotates on the guide groove and ascends thereon. Simultaneously, since the link 15a rotates with the pin 14 working as the fulcrum, the bracket 3 rotatingly ascends. As a result, the cover 2 is fully opens. When the bracket 3 is pulled down by the cylinder 16 from above condition, the reverse operation occurs and the cover 2 is closed again. When the cover opening/closing system is thus configurated, only one drive cylinder is necessary. Thereby, structure is simplified and cost can also be reduced, resulting in compact semiconductor device manufacturing apparatus. |
