| 摘要 |
PURPOSE:To obtain the titled film capable of omitting a spin-coating process by incorporating a polymer having a specific repeating unit, and a photopolymerization initiator as an essential component to the titled film, thereby making a photosensitive film to a dry film with a resist having heat-resisting property. CONSTITUTION:The titled film contains the polymer having the repeating unit shown by formula I and the photopolymerization initiator as the essential component. In formula I, X is a (2+n) valence carbon ring or heterocyclic ring, Z is imido ring, quinazolinedione or oxazinedione ring, R is a group having carbon- carbon double bond, W is a group capable of forming a ring by reacting with carbonyl group of -COOR at the time of cleaving ROH by heat-treating, (n) is 1 or 2, (m) is 0, 1 or 2, and COOR group and Z group have the inter-relationship between an ortho and a peri positions. Thus, the spin-coating process can be omitted, and all processes can be carried out by a continous-operation whereby the through-put of the titled film is improved, and the manufacturing process makes possible to automatize. |
