APPARAT FOR OPTISK UNDERSOKNING AV FOREMAL

摘要

An optical inspection system is disclosed which determines surface and other features of objects by illuminating them with a light beam having substantially uniform light intensity in space and time. The light beam is derived from a light source whose light intensity may vary in space and time. The surface features of each object are inspected by detecting light reflected from the object through a lens system which focuses the reflected light on an array of photosensitive elements. The output signals provided by the array may be used to provide a measure indicative of the conformance of the inspected surface to predetermined criteria. The inspection system is further capable of determining other features of the inspected object, such as the height of the object, by illuminating the object with a second light beam derived from a second light surface. A portion of the second light beam is eclipsed by the object and the non-eclipsed portions are directed to a second array of photosensitive elements to provide signals indicative of the desired dimension.