| 摘要 |
PURPOSE:To contrive the improvement of growth yield by a method wherein a cloth-shaped substrate knitted with a fibrous material getting wet with a silicon fused liquid is pulled up from the silicon fused liquid and a flat-plate shaped shaped silicon substrate with large area is easily and continuously grown without deteriorating crystal growth. CONSTITUTION:Three pieces of fibrous material getting wet with a silicon fused liquid 1, for example, a thin cloth-shaped substrate 5 knitted with carbon fiber, silicon carbide fiber, is provided between rollers 3, 4 and the tip section of the substrate 5 is pulled up and is fixed to a jig 6. With the substrate 5 pulled up from the silicon fused liquid 1, a flat-plate shaped silicon fused liquid 1 is formed on both the faces by surface tension for crystallization and a silicon substrate 7 is formed. In this method, temperature control for silicon fused liquid can relatively and easily be done and the improvement of growth yield can be achieved to continuously grow a silicon substrate with large diameter of crystalline grain and large area. |
