| 摘要 |
PURPOSE:To obtain a reinforcing material for glass panel and a protective material against mechanical stress by a method wherein carbon having 2.6- 4.5eV or a film having carbon as a principal component is coated on the surface of galss, metal or ceramic. CONSTITUTION:Energy of 0.1-5kW is applied to reactive vapor by electromagnetic energy from a microwave of 2.45GHz and the reactive vapor is activated, decomposed or reacted in an excitation chamber. Furthermore, the reactive vapor is heated at 150-450 deg.C in a reactive furnace 1 by heating furnace 9. Fur thermore, the reactive vapor is reacted and polymerized by high-frequency energy 2 of 13.56MHz to grow the carbon of amorphous sturture forming many C-C bonds. A substrate 10 is heated by a heater 11 through a power source 13 and this reaction product is formed as a film on the surface of the substrate 10. In this way, carbon, especially, carbon containing 25% by mol or less of hydrogen in the carbon and carbon having P, I or N type conductive type is formed on the substrate having a formed face. |
