发明名称 |
MANUFACTURE OF A GROUP OF INFRA-RED DETECTOR ELEMENTS, AND A GROUP SO MANUFACTURED |
摘要 |
<p>1 PHB. 32,630. A group of infra-red radiation detector elements are manufactured from a body of infra-red sensitive materials on an insulating substrate using two masking steps which do not require critical alignment even with close spacing between the elements. A first masking layer e.g. of photoresist is formed on the upper surface of at least the body to determine by a lift-off technique a metallization pattern on the body and the substrate. A second masking layer e.g. of photoresist is then provided to determine by ion-bombardment through windows of this layer the desired pattern of elements and their electrodes. The ion-bombardment permits removal of exposed areas of not just the body and metallization pattern but also of a passivating layer on the body surfaces; a closely spaced group of elements and their electrodes can be obtained because the ion-bombardment results in steep sides without significant undercutting.</p> |
申请公布号 |
CA1143461(A) |
申请公布日期 |
1983.03.22 |
申请号 |
CA19790332582 |
申请日期 |
1979.07.26 |
申请人 |
N.V. PHILIPS'GLOEILAMPENFABRIEKEN |
发明人 |
BAKER, IAN M.;WITHERS, RICHARD B. |
分类号 |
H01L21/302;H01L21/3065;H01L21/465;H01L21/467;H01L25/04;H01L27/146;H01L31/0264;(IPC1-7):H01L31/18 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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