| 摘要 |
PURPOSE:To mechanize the entire stage for manufacture of liquid crystal display elements by providing a stage of providing marks of a metal alone on glass substrates and a stage which detects the marks with reflection mark sensors and automates adhering of the glass substrates. CONSTITUTION:Photoresist 2 is coated on a glass substrate 1, and is patterned with a photomask 3, then the photoresist is irradiated with UV light. The unsensitized parts of the photoresist 2 are melted in a developing soln. to leave only the sensitized parts 2a on the substrate 1. Metallic In4 is vapor deposited over the entire surface by sputtering. The photoresist 2a is removed. The metallic In4a for electrodes and metallic In4b for marks are stuck on the substrate 1. An insulation film 5 of SiO2, etc. is coated only on the In4b in order to prevent oxidation in the next calcining stage. When calcined, the In4b turns to In2O3 4c and forms a transparent conductive film. The mark 4b of the metal alone and the transparent conductive film 4c of the metallic oxide are formed on the substrate 1. |
