| 摘要 |
PURPOSE:To provide a compact motor-operated device which detaches and conveyes a wafer from a wafer cartridge, reduces a shock produced when detaching and conveying the wafer, and improves a cleaning property. CONSTITUTION:A wafer cartridge 3 is lowered in a pitch-feed manner by an elevator unit 1. Through reversing of a feed screw shaft 11 in a helical gear- driven unit 10, helical gears A directly engaging with the screw shaft 11 spin. This causes lowering of free helical gears B, lowering of a vertical moving shaft 12, and inserting of a wafer support 8 into the cartridge 3 through the medium of an arm member 9. The wafer support 8 stops moving right below a wafer 4, and with the feed screw 11 in the helical gear unit 10 turned in a normal manner, the free helical gears B are raised and turned. This causes raising of the wafer support 8 in a similar manner to perform operations to push up and move forward and wafer 4 from the inside of the cartridge 4 for conveyance. |
