| 摘要 |
PURPOSE:To obtain an inspecting device for the defect of a pattern which can detect a defect with high accuracy and has sufficient resolution and accuracy, by a method wherein reference pattern information and a pattern of tested body are compared and checked automatically and in real time. CONSTITUTION:At a stage unit 30, linear encoders 39, 40 monitor the movement of X, Y tables 36, 35, scanned data of tested body, and feeds their movement to a stage position corrector 41. Then the deviation of X and Y directions is compared and corrected. The result is supplied from an image sensor 43 to a video amplifier of a controller 60 as data for comparison. At a video conversion unit 50, a PG tape 51 is converted into a reticle tape 51 for test, which is converted into image by a video signal converter 55, then this is stored in a video memory 58, and read out, by the control of a magnetic tape controller 56, from a video signal output controller 59 while corresponding to the part scanned by the sensor 43, and input to a comparator 65. A signal that has received comparison operation is fed to a data processor 67 to perform various kinds of processing. |
