| 摘要 |
PURPOSE:To very correctly analyze picture information, by scanning a sample with an electron beam, obtaining plural picture informations, simultaneously displaying the plural picture informations in different color and correctly recognizing corresponding relations of these picture informations. CONSTITUTION:Two image data V1, V2, obtained by scanning an electron beam 3, are completely synchronously stored to a prescribed address in an image memory 11 by address data AD, and the stored data are read by a read signal RO from a display device 18, when the two images are displayed, an electron beam image and X-ray analyzed image are completely duplicated with each other in prescribed relation. In this case, the both images are in different color, and the operator can separately identify the both images, further a corresponding relation of the both images can be understood at a glance, and very correct evaluation can be performed while considering the X-ray analyzed image and shape or the like of an actual sample. |
