| 摘要 |
PURPOSE:To contrive improvement in positioning accuracy without using a mechanical feeding structure by a method wherein the material to be controlled is shifted utilizing a magnetic fluid. CONSTITUTION:A table 1 is supported between a pair of supporting member 9 using supporting rods 7 through the intermediary of springs 8, rubber tubes wherein a magnetic fluid was hermetically sealed are connected in between a pair of a reference stands 3, electromagnets 5 and 6 are arranged around the rubber tubes 2, and the number of turns of the coil on the electromagnets 5 is increased from that of the electromagnet 6. Then, when the electromagnets 5 and 6 are excited and a magnetic field is applied in the magnetic fluid, each rubber tube 2 is transformed due to the magnetization of the magnetic fluid and contracted in the axial direction. Thereupon, as the number of coil turns of the electromagnets 5 and 6 differs to each other, the force working on each rubber tube differs, and the difference of the force is applied to the table 1, thereby enabling the positioning of the device. |
