| 摘要 |
PURPOSE:To enable the plasma distribution monitor device measuring the partial variation of the state of plasma by a method wherein an optical fiber fitted while being adjoined to a window receiving plasma beams is moved while being conformed to the shape of the window, the plasma beams radiated from the window are condensed through the optical fiber and spectroscopically measured, the position of the operation of the optical fiber and measured value spectroscopically measured are synchronized, and data are processed. CONSTITUTION:The optical fiber 6 can be moved to the arbitrary position of the window 5 by means of a drive section 7, and a spectroscope 9 receives the plasma beams at locations set by means of the drive section 7 through a slit 8 and measures the beams spectroscopically. A detector 10 receiving a spectral line from a diffraction grating 93 through reflector 95 detects the spectral distribution of the plasma beams, the results are synchronized with the position of the operation of the optical fiber and the position of the revolution of a pulse motor 94 in a data processing section 11, and the data are processed, and recorded by means of a recording section 12. The state of the distribution of plasma to each observing location, comparison with spectral distribution in case of the optimum condition as the result of a fixed position, etc. can be observed and monitored on the basis of the function. |
