INTERFEROMETRICALLY CONTROLLED STAGE WITH PRECISELY ORTHOGONAL AXES OF MOTION,申请号GB19800005832-传众专利搜索

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发明名称	INTERFEROMETRICALLY CONTROLLED STAGE WITH PRECISELY ORTHOGONAL AXES OF MOTION
摘要
申请公布号	GB2046955(B)	申请公布日期	1983.03.16
申请号	GB19800005832	申请日期	1980.02.21
申请人	OPTIMETRIX CORP	发明人
分类号	G03F7/20;(IPC1-7):G05D3/12;G01P3/36	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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