发明名称 LIQUID PHASE EPITAXIAL GROWTH APPARATUS
摘要 PURPOSE:To execute efficient growth, by providing a first slidable member having a liquid phase material reservoir on the upper face of the support of a base plate having a through hole for installing a base plate on the inside wall, and a second slidable member having a liquid phase used material reservoir on the lower face, and adjusting relation of arrangement of both reservoirs with respect to the through hole. CONSTITUTION:A first slidable member 21 having reservoirs 25, 27, 29 for containing a liquid phase material for being used for crystal growth is provided on the upper face of the support 23 of a base plate having a through hole 36 in the vertical direction for enabling installation of a base plate 35 on the inside wall. A second slidable member 22 having a reservoir 30 for containing a used liquid phase material is provided along the lower face. The arrangement relation of the reservoirs of the 2 members 21, 22 is adjusted with respect to the hole 36 of the support 23 to successively drop the material out of the reservoirs 25, 27, 29 of the member 21 through the hole 36 to the reservoir 30 of the member 22.
申请公布号 JPS5845192(A) 申请公布日期 1983.03.16
申请号 JP19810143304 申请日期 1981.09.10
申请人 FUJITSU KK 发明人 YAMAMOTO KOUSAKU;KAWABATA YOSHIO;NISHIJIMA YOSHITO;FUKUDA HIROKAZU;SHINOHARA KOUJI
分类号 C30B19/06;H01L21/208;H01S5/00 主分类号 C30B19/06
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