ELEKTROMAGNETISCHES STELLELEMENT

摘要

The present electromagnetic control element for positioning functions in the submicrometer range consists of a combination of coil body (3) and coil winding (7) arranged coaxially in a hollow cylindrical permanent magnet (2). The coil body (3) is supported at both ends by disc-shaped springs (4, 4') which allow only deflection in an axial direction. This arrangement results in a compact, simple and highly accurate control element.