| 摘要 |
PURPOSE:To prevent the damage of the wafer by mounting the lifting base of a cassette horizontally supporting the wafer at one end of the sliding base of a boat vertically supporting the wafer and automatically transporting the wafer through a vacuum chuck between the cassette and the boat. CONSTITUTION:The boat sliding base 3 is moved so that the fitting groove 34 of the emd section reaches just under the adsorbing section 20 of the vacuum chuck 5 by the command of a controller, and the lifting base 4 and the cassette 15 are moved so that the fitting groobe of the lowermost end section reaches the same height as the adsorbing section 20. The wafers 33 are adsorbed 20 by one sheer from the cassette and extracted, the chuck section 20 is turned at 90 deg.C and driven 17 and dropped, and fitted into the vertical groove 34 of the boat 13, adsorption is released, and the chuck section 20 is returned. The boat and the cassette are moved 6 at desired pitches, and the wafer is loaded. The wafers can be loaded accurately only by giving the kinds of the boats when the individual character of the boats is previously memorized to the controller, and the wafers can be unloaded through reverse and forward operation while the pollution and damage of the wafers can be prevented. |
